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Extreme ultraviolet lithography
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SEMATECH
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Photomask
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Mask shop
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Advanced Technology Development Facility
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http://www.sematech.org/meetings/archives/litho/7533/berglund.pdf
Anchor text: An Analysis of the Economics of Photomask Manufacturing Part – 1: The Economic Environment
http://www.sematech.org/corporate/news/releases/20070213.htm
Anchor text: ATDF & ACC Seeking Summer Interns for Innovative Nanoscholars Program.