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Open Artwork System Interchange Standard
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SMIF (interface)
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Roos Instruments
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Standard cubic centimetres per minute
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Wikipedia Links
https://store-us.semi.org/products/p03800-semi-p39-specification-for-oasis%C2%AE-open-artwork-system-interchange-standard
Anchor text: SEMI SEMI P39 - Specification for OASIS
https://store-us.semi.org/products/p03800-semi-p39-specification-for-oasis%C2%AE-open-artwork-system-interchange-standard?_pos=1&_sid=1c0bcca9d&_ss=r
Anchor text: SEMI P39 OASIS Standard
https://store-us.semi.org/products/p04400-semi-p44-specification-for-open-artwork-system-interchange-standard-oasis-%C2%AE-specific-to-mask-tools?_pos=2&_sid=1c0bcca9d&_ss=r
Anchor text: SEMI P44 OASIS Standard